A lithographic (litho) hotspot is a defect on a wafer that is created during manufacturing by a combination of systematic process variation and resolution enhancement technology (RET) limitations.

More aggressive feature scaling and increasingly complex transistor structures are driving a steady increase in process complexity, increasing the risk that a specified pattern may not be ...

Design patterns have evolved to address problems that are often encountered in software applications. They are solutions to recurring problems and complexities in software design. We’ve discussed many ...