MEMS is an acronym that stands for microelectromechanical systems – exceptionally small devices that incorporate mechanical, electrical, and frequently optical components on a single microchip. These ...

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Abstract: This paper presents a MEMS electric field sensor featuring a comb-actuated resonant torsional shutter for DC electric field sensing. The sensor employs a torsional shutter driven by comb ...

Abstract: Infrasonic underwater sensing remains a critical challenge due to the limitations of conventional acoustic sensors in achieving high sensitivity at very low frequencies. This paper presents ...