Abstract: This paper describes two advanced technologies recently adopted in back-end-of-line (BEOL) process for our logic products: self-aligned-universal-patterning (SAUP) and sacrificial oxide ...
Theodore Toad,' a creation of Aiken-based author/illustrator Sebastian O'Banion, was a topic of discussion Jan. 9 at Horse ...
Abstract: In this manuscript, an experimental study to optimize the tungsten (W) deposition process was carried out to address the poor fill seam issue and to improve the contact resistance in CMOS ...
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